Silicon as a light element can be used as the
tokamak first wall coating in order to protect the plasma
from impurities which come from the wall. In this paper,
we deposit an amorphous-silicon layer by the use of the
glow discharge technique on the wall surface of the test
chamber made from SS316. To do so, we employ silane as
a source of silicon ions. The siliconization process is
conducted at two time durations of 90 and 150 min. SEM
image of the coated surface shows that the structure of the
coated layer deposited by the 150-min is more compact in
comparison with that of 90-min. Effect of current density
on coating properties is evaluated by placing four samples
at different locations on the wall surface which shows that
the optimal values of current density are in the range of
14–20 lA/cm2 and the higher range of current density can
damage the coating. The results confirm that by increasing
the time of siliconization the coating thickness is increased
successfully from 100 to 250 nm without appearance of
any damage in coating.