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Abstract
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studying the electron temperature and electron density is crucial for any plasma-related application. In this study, the optical emission spectroscopy (OES) technique was used to determine plasma parameters such as electron density and electron temperature in a low
pressure glow discharge argon plasma. To achieve this, a cylindrical glass tube was employed as the discharge chamber. By analyzing the obtained electron density and temperature values at different voltages, it was observed that a significant relationship exists between the applied voltage to the electrodes and the plasma parameters. The results showed that by increasing the voltage, the electron temperature also rises, and the minimum and maximum electron densities were obtained at 600 volts and 800 volts, respectively.
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