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Keywords
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glow discharge, hollow cathode, argon, helium, total energy loss,
secondary electron emission coeffiient
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Abstract
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In this article, we focus on some of the fundamental parameters of SS316L hollow cathode
glow discharge. Four SS316L samples are placed at different locations on the cathode surface
and the current passed through them is measured in Ar and He glow discharge plasmas. The
wall current densities of Ar and He are in the range of 8 –25 µA cm −2 and 8 –35 µA cm −2,
respectively. Results also show that with decreasing working pressure, the ion flx and current
density distribution on the wall surface becomes more uniform. The ion flx of the Ar and
He is in the range of 1013 to 1014 ion cm −2. Total energy losses of Ar and He are measured
at the pressure range of 1.4 –5.5 × 10 −2 torr and 3.2 –7.1 × 10 −1, respectively. In both Ar and
He, total energy losses decreased with increasing pressure. The secondary electron emission
coeffiients of Ar and He, which are evaluated for the hallow cathode confiuration, are about
0.42 and 0.26, respectively, and are higher in comparison with the plate cathode confiuration.
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